DocumentCode
2209028
Title
Reduced Radius Removal and its Effect on In-line and Field Reliability Improvements
Author
Torabi, Hamid
Author_Institution
IBM
fYear
1993
fDate
24-27 Oct 1993
Firstpage
1
Lastpage
7
Keywords
Control systems; Fabrication; Failure analysis; Manufacturing; Process design; Production facilities; Semiconductor device measurement; Shape; Stress; Testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Integrated Reliability Workshop Final Report, 1993 International
Type
conf
DOI
10.1109/IRWS.1993.666286
Filename
666286
Link To Document