DocumentCode :
2209813
Title :
Absolute measurements of rf fields using a retarding field energy analyser
Author :
Charles, Christine ; Degeling, A. ; Sheridan, T. ; Harris, J. ; Boswell, Rod ; Lieberman, M.
Author_Institution :
Plasma Res. Lab., Australian Nat. Univ., Canberra, ACT, Australia
fYear :
2000
fDate :
4-7 June 2000
Firstpage :
228
Abstract :
Summary form only given. We present measurements of ion energy distribution functions obtained with a single retarding field energy analyser (RFEA) along the axis of a low pressure helicon source. We have found that for high densities, the sheath thickness becomes small and sheath effects can be measured by the RFEA: a transition from a high frequency (single peak distribution) to a low frequency (bimodal distribution) sheath has been observed in the helicon source both for the capacitive and inductive modes. The energy difference between the two peaks of the bimodal distribution is related to the rf modulation of the plasma potential and to the ratio between the ion transit time in the sheath and the rf period. While the limiting cases of high and low frequency sheaths can be dealt with analytically, most of the results obtained correspond to a middle-ground where the phase mixing effect on the distribution function of the ion transit time across the sheath must be taken into account.
Keywords :
plasma diagnostics; plasma sheaths; RF fields; RF modulation; absolute measurements; bimodal distribution; capacitive modes; high frequency sheaths; inductive modes; ion energy distribution functions; ion transit time; low frequency bimodal distribution sheath; low frequency sheaths; low pressure helicon source; phase mixing effect; plasma potential; retarding field energy analyser; Density measurement; Distribution functions; Energy measurement; Plasma density; Plasma devices; Plasma measurements; Plasma temperature; Plasma waves; Probes; Radio frequency;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Plasma Science, 2000. ICOPS 2000. IEEE Conference Record - Abstracts. The 27th IEEE International Conference on
Conference_Location :
New Orleans, LA, USA
ISSN :
0730-9244
Print_ISBN :
0-7803-5982-8
Type :
conf
DOI :
10.1109/PLASMA.2000.855056
Filename :
855056
Link To Document :
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