Title :
Design and Testing of Single and Double Sided Cantilevers for Chemical Sensing
Author :
Choudhury, A. ; Hesketh, P.J. ; Thundat, T.G. ; Zhiyu Hu ; Vujanic, R.
Author_Institution :
Georgia Inst. of Technol., Atlanta
Abstract :
Two approaches to surface stress-based chemical sensing with piezoresistive microcantilevers are compared. Microcantilever-based chemical sensing is usually performed by functionalizing a single surface of the cantilever (single-sided surface stress-SSS). Sensitive measurements can be made by functionalization of both surfaces of the cantilever (double-sided surface stress-DSS). Design issues related to the sensitivity of these measurement principles are discussed. Also, a low noise method of measuring cantilever resistance is used for evaluation of surface stress response.
Keywords :
cantilevers; chemical sensors; micromechanical devices; cantilever resistance measurement; chemical sensing; double sided cantilevers; double-sided surface stress; low noise method; piezoresistive microcantilevers; single sided cantilevers; single-sided surface stress; Acoustic sensors; Chemical sensors; Decision support systems; Electrical resistance measurement; Optical surface waves; Piezoresistance; Stress measurement; Surface acoustic waves; Surface resistance; Testing;
Conference_Titel :
Sensors, 2007 IEEE
Conference_Location :
Atlanta, GA
Print_ISBN :
978-1-4244-1261-7
DOI :
10.1109/ICSENS.2007.4388682
