• DocumentCode
    2212293
  • Title

    Reliability Overview of RF MEMS Devices and Circuits

  • Author

    Melle, S. ; Flourens, F. ; Dubuc, D. ; Grenier, K. ; Pons, P. ; Pressecq, F. ; Kuchenbecker, J. ; Muraro, J.L. ; Bary, L. ; Plana, R.

  • Author_Institution
    LAAS-CNRS 7 avenue du Colonel Roche, 31077 Toulouse, France
  • fYear
    2003
  • fDate
    Oct. 2003
  • Firstpage
    37
  • Lastpage
    40
  • Abstract
    This paper outlines the reliability properties of RF MEMS devices and circuits. The tools used to evaluate the reliability properties are presented. Results are shown on both moveable and non moveable devices. Key parametrers that drive the reliability are pointed out : stress, roughness, temperature dependance, dielectric properties. Finally, it is presented some solutions to improve the reliability performance of these devices in term of technology and design.
  • Keywords
    Aerospace industry; Circuits; Filters; Packaging; Phase shifters; Radiofrequency microelectromechanical systems; Space technology; Switches; Varactors; Wireless communication;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microwave Conference, 2003 33rd European
  • Conference_Location
    Munich, Germany
  • Print_ISBN
    1-58053-834-7
  • Type

    conf

  • DOI
    10.1109/EUMA.2003.340820
  • Filename
    4142948
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2212293