New developments in processing cathodic arc plasmas

Filtering of the plasma by curved solenoidal ducts is well known as a method of removing macroparticles. By analysing the interactions of planar probes with the drifting plasma of the cathodic arc, new insights have been obtained into the operation of these ducts. Theoretical modelling of these interactions suggests, and experiment confirms, that the use of a separate biased electrode on the inside of the duct gives enhanced transmission. Theoretical modelling of a negatively biased planar electrode lying parallel to the drift velocity and experiment show that ions are captured effectively producing a macroparticle free film. The application of pulsed high voltage to the substrate is treated theoretically and a model is proposed which gives a good agreement with the profile of a silicon surface coated and simultaneously implanted with titanium