• DocumentCode
    22163
  • Title

    Guided-Mode Resonant \\hbox {HfO}_{2} Grating at Visible Wavelength Range

  • Author

    Yongjin Wang ; Xumin Gao ; Zheng Shi ; Lifeng Chen ; Lopez Garcia, Martin ; Hueting, Nikolai A. ; Cryan, Martin ; Xin Li ; Miao Zhang ; Hongbo Zhu

  • Author_Institution
    Gruenberg Res. Centre, Nanjing Univ. of Posts & Telecommun., Nanjing, China
  • Volume
    6
  • Issue
    2
  • fYear
    2014
  • fDate
    Apr-14
  • Firstpage
    1
  • Lastpage
    7
  • Abstract
    Subwavelength HfO2 gratings are realized on a freestanding 200-nm-thick HfO2 membrane with air as the low refractive index materials on top and bottom. Strong coupling between the incident light and HfO2 grating is characterized by angular-resolved reflectivity measurement, and guided-mode resonances are experimentally demonstrated with the sensitivities to the parameters and shapes of grating and the polarization of incident beam. The experimental results are consistent with numerical simulation. This work opens the way to fabricate guided-mode resonant HfO2 photonic devices in the visible wavelength range.
  • Keywords
    diffraction gratings; hafnium compounds; light polarisation; membranes; reflectivity; HfO2; air; angular-resolved reflectivity measurement; freestanding HfO2 membrane; guided-mode resonant HfO2 grating; incident beam polarization; incident light; low refractive index materials; size 200 nm; visible wavelength range; Filling; Gratings; Hafnium compounds; Reflectivity; Refractive index; Silicon; Subwavelength $hbox{HfO}_{2}$ grating; angular-resolved reflectivity refractive index sensing; guided-mode resonance;
  • fLanguage
    English
  • Journal_Title
    Photonics Journal, IEEE
  • Publisher
    ieee
  • ISSN
    1943-0655
  • Type

    jour

  • DOI
    10.1109/JPHOT.2014.2309641
  • Filename
    6758364