Millimeter wave phase shifters with periodically spaced MEMS bridges loaded

Author

Fangmin, Guo ; Zongsheng, Lai ; Guanglong, Wu ; Shouzheng, Zhu ; Ziqiang, Zhu ; Gengqin, Yang ; Xiaohong, Ge ; Siqing, Chen ; Jianfang, Xie

Author_Institution

Dept. of Electron Eng., East China Normal Univ., Shanghai, China

Volume

2

fYear

2001

fDate

22-25 Oct. 2001

Firstpage

769

Abstract

A basic structure of MEMS millimeter-wave phase shifters is presented, which consists of a coplanar wave-guide (CPW) transmission line periodically loaded with 8∼32 MEMS metal bridges. The switching element consists of a thin metallic membrane, which has two states, actuated or unactuated, depending on the applied bias. The phase shifters in the Micro-Electromechanical System (MEMS) techniques were measured by using the Cascade 12000 Microwave Probe and Hp-8722D Vector Network Analyzer in the frequency range of 1-10 and 30-40 GHz. The measured results demonstrate that the phase shifter with 8 bridges loaded has phase shifted 30∼ 68° and 1.095dB insertion loss at 2.395 GHz.

Keywords

coplanar transmission lines; coplanar waveguides; microswitches; millimetre wave phase shifters; 1 to 10 GHz; 30 to 40 GHz; MEMS metal bridges; MEMS millimeter-wave phase shifters; applied bias; coplanar waveguide transmission line; switching element; thin metallic membrane; vector network analyzer; Biomembranes; Bridge circuits; Coplanar transmission lines; Coplanar waveguides; Microelectromechanical systems; Micromechanical devices; Millimeter wave technology; Phase measurement; Phase shifters; Transmission line measurements;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State and Integrated-Circuit Technology, 2001. Proceedings. 6th International Conference on

Print_ISBN

0-7803-6520-8

Type

conf

DOI

10.1109/ICSICT.2001.982008

Filename

982008