The design and fabrication of a miniaturized differential-capacitive triaxial accelerometer

Author

Cao, Xinping ; Zhang, Dacheng ; Huang, Ru ; Zhang, Xing ; Wang, Yangyuan

Author_Institution

Inst. of Microelectron., Peking Univ., Beijing, China

Volume

2

fYear

2001

fDate

22-25 Oct. 2001

Firstpage

785

Abstract

A novel triaxial fully-differential-capacitive accelerometer has been designed and fabricated. The accelerometer has three independent devices on a common glass substrate proof-mass detecting the acceleration vector. The designed structures of the accelerometer are analysed in detail theoretically and simulated using FEM program ANSYS. The result of the simulations show the device has sensitivities of about 17 fFg^-1, 17fFg^-1 and 16 fFg^-1 in the X-axis, Y-axis and Z-axis respectively. The fabrication combines inductively coupled plasma (ICP) high aspect ratio with glass/silicon bonding technology, thus, the devices are implemented very simply.

Keywords

accelerometers; finite element analysis; micromechanical devices; ANSYS; FEM; Si; glass substrate; glass/silicon bonding technology; inductively coupled plasma high aspect ratio; miniaturized differential-capacitive triaxial accelerometer; squeeze film damping; Acceleration; Accelerometers; Bonding; Capacitors; Damping; Fabrication; Optical films; Plasma accelerators; Plasma applications; Plasma devices;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State and Integrated-Circuit Technology, 2001. Proceedings. 6th International Conference on

Print_ISBN

0-7803-6520-8

Type

conf

DOI

10.1109/ICSICT.2001.982012

Filename

982012