Title :
The investigation of the detection mechanism for micromachined accelerometers with gaseous proof mass
Author :
Min, Miao ; Fuxue, Zhang ; Guoying, Wu
Author_Institution :
Inst. of Microelectron., Peking Univ., Beijing, China
Abstract :
A new mechanism of acceleration detection is discussed in this paper, on the basis of which micromachined accelerometers with gaseous proof mass can be developed. The new concept of "Gas Pendulum" is introduced to theoretically explain this mechanism. Three types of macroscopic devices utilizing this mechanism are demonstrated. The experimental results show that the accelerometer can measure acceleration up to ±5g, and has a resolution better than 2 × 10-4 g. The characteristics of this method and the prospect of its application in micromachined accelerometers are also discussed.
Keywords :
acceleration measurement; accelerometers; microsensors; natural convection; pendulums; acceleration detection; acceleration measurement; detection mechanism; gas pendulum; gaseous proof mass; hermetic chamber; macroscopic devices; micromachined accelerometers; natural convection field; Acceleration; Accelerometers; Biomedical measurements; Fluid flow; Force sensors; Gravity; Heat transfer; Microelectronics; Space technology; Temperature;
Conference_Titel :
Solid-State and Integrated-Circuit Technology, 2001. Proceedings. 6th International Conference on
Print_ISBN :
0-7803-6520-8
DOI :
10.1109/ICSICT.2001.982018
