Title :
A Low-Loss Distributed 2-Bit W-Band MEMS Phase Shifter
Author :
Hung, Juo-Jung ; Dussopt, Laurent ; Rebeiz, Gabriel M.
Author_Institution :
University of Michigan, Department of Electrical Engineering and Computer Sciences, 1301 Beal Avenue, Ann Arbor, Michigan, 49109-2122, USA. E-mail: jjhung@umich.edu
Abstract :
A low-loss 2-bit wide-band distributed microelectromechanical system transmission line (DMTL) phase shifter has been developed on a 500 ¿m glass substrate for W-band operation. The coplanar waveguide (CPW) design is periodically loaded by MEMS switches in series with high-Q MAM (Metal-Air-Metal) capacitors, and shows a reflection coefficient better than -11 dB through the whole W-band frequency range (75-110 GHz) and phase shifts of 0°, 89.3°, 180.1°, 272° at 81 GHz with an average insertion losses of -2.2 dB. This is currently the lowest-loss phase shifter at W-band frequencies.
Keywords :
Capacitors; Coplanar transmission lines; Coplanar waveguides; Frequency; Glass; Microelectromechanical systems; Micromechanical devices; Microswitches; Phase shifters; Wideband;
Conference_Titel :
Microwave Conference, 2003 33rd European
Conference_Location :
Munich, Germany
Print_ISBN :
1-58053-834-7
DOI :
10.1109/EUMA.2003.341128
