Title :
Ultra Low Cost Single-Step Fabrication of Double-Sided YBa2Cu3O7-δFilms by the Non-Vacuum MOD Method for Microwave Circuits
Author :
Sanada, Atsushi ; Kimura, Masao ; Awai, Ikuo
Author_Institution :
Yamaguchi University, Ube, Yamaguchi 755-8611, Japan
Abstract :
Low-cost, single-step fabrication of double-sided YBa2Cu3O7-δ(YBCO) high-temperature superconducting (HTS) films on a (001)LaAlO3 substrate for microwave applications are demonstrated by the metalorganic deposition (MOD) method, which is a liquid-phase non-vacuum fabrication process. High quality HTS films with the critical temperature (Tc) of 90.4K and the surface impedance Rs of less than 0.1mΩ at 42K and 9.99GHz is achieved. X-ray diffraction (XRD) pattern and scanning electron microscope (SEM) observation are also carried out and the epitaxial growth of c-axis oriented YBCO crystals is confirmed. The measured unloaded quality factor (Qu) of 2.68×104 is achieved for a half-wavelength microstrip resonator fabricated on the YBCO film at 30K and 2.511GHz.
Keywords :
Costs; Fabrication; High temperature superconductors; Microwave theory and techniques; Scanning electron microscopy; Substrates; Superconducting epitaxial layers; Superconducting films; Superconducting microwave devices; Yttrium barium copper oxide;
Conference_Titel :
Microwave Conference, 2003 33rd European
Conference_Location :
Munich, Germany
Print_ISBN :
1-58053-834-7
DOI :
10.1109/EUMA.2003.340857
