Hybrid Amorphous/Nanocrystalline Silicon Schottky Diodes for High Frequency Rectification

We report hybrid amorphous (a-Si)/nanocrystalline (nc-Si) Schottky diodes for rectification at high frequencies. All fabrication steps are done at , making them compatible with processing on plastic. The diodes have a high current density (5 A/cm² at 1 V and 100 A/cm² at 2 V) and on-to-off current ratio (over 1000 for bias voltages of 1/-8 V). A 0.01- mm² hybrid diode has a series resistance of 200 Ω and a capacitance of 7 pF, leading to a cutoff frequency of 110 MHz. As a half-wave rectifier driving a parallel 1- MΩ resistive and 100-nF capacitive load, the dc rectified voltage drops at frequencies , with a -3 dB point at 70 MHz.