Sliding Probe Methods for In Situ Nanorobotic Characterization of Individual Nanostructures

Sliding probe methods are designed for the in situ characterization of electrical properties of individual 1-D nanostructures. The key to achieving a high resolution is to keep the contact resistance constant by controlling the contact force and area between the specimen and the sliding probe. We have developed several techniques and tools including differential sliding, flexible probes, and specimen-shape-adaptable probes using nanorobotic manipulation. Compared with conventional methods, these sliding probe methods allow in situ characterization with a higher resolution than conventional methods. Furthermore, they are superior for local property characterization, which is of particular interest for heterostructured nanomaterials and defect detection.