Combination of a fluidic micro-oscillator and micro-actuator in LIGA-technique for medical application

Author

Gebhard, Ute ; Hein, Herbert ; Just, Elmar ; Ruther, Patrick

Author_Institution

Inst. fur Mikrostrukturtech., Forschungszentrum Karlsruhe GmbH, Germany

Volume

2

fYear

1997

fDate

16-19 Jun 1997

Firstpage

761

Abstract

In this paper for the first time a modular built dynamic microsystem consisting of a combination of two separately fully functional fluidic devices fabricated by the LIGA-technique is presented. One of the two devices is a fluidic micro-oscillator, which needs only one fluid supply to generate an oscillating fluid jet at its two output ports. The other device is a linear actuator in which the fluidic energy is transformed into mechanical energy via a double acting piston placed in a linear actuator housing. Together the two devices form a dynamic microsystem which can be used in medical application

Keywords

X-ray lithography; biomedical equipment; electroforming; fluidic devices; microactuators; patient treatment; surgery; LIGA-technique; double acting piston; fluidic micro-actuator; fluidic micro-oscillator; fully functional fluidic devices; linear actuator; medical application; minimally invasive cardiac therapy; modular built dynamic microsystem; Biomedical equipment; Fluid dynamics; Fluidic microsystems; Frequency; Hydraulic actuators; Medical services; Medical treatment; Microactuators; Microfluidics; Oscillators;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on

Conference_Location

Chicago, IL

Print_ISBN

0-7803-3829-4

Type

conf

DOI

10.1109/SENSOR.1997.635211

Filename

635211