Title :
Design and fabrication of a LIGA Milliengine
Author :
Garcia, Ernest J. ; Christenson, Todd R. ; Polosky, Marc A. ; Jojola, Andres A.
Author_Institution :
Sandia Nat. Labs., Albuquerque, NM, USA
Abstract :
This paper reports on the design and fabrication of a new milliscale magnetic actuator that is ideally suited for LIGA processing. LIGA processing permits the fabrication of millisized machine elements that cannot be fabricated by conventional miniature machining techniques because of their small feature sizes. The Milliengine is a magnetically driven device that utilizes a unique design to extend the 2-dimensional fabrication capability of LIGA to create 3-dimensional machinery
Keywords :
X-ray lithography; design engineering; electroforming; magnetic circuits; microactuators; position control; 3-dimensional machinery; LIGA processing; Milliengine; design; fabrication; magnetic circuits; magnetically driven device; milliscale magnetic actuator; mirror positioning; small feature size; Actuators; Couplings; Fabrication; Gears; Machinery; Magnetic circuits; Magnetic devices; Magnetic flux; Magnetic levitation; Microelectromechanical devices;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.635212
