Characteristics of liquids atomization using surface acoustic wave

Author

Kurosawa, Minoru ; Futami, Akira ; Higuchi, Toshiro

Author_Institution

Dept. of Precision Machinery Eng., Tokyo Univ., Japan

Volume

2

fYear

1997

fDate

16-19 Jun 1997

Firstpage

801

Abstract

A novel way to produce dry fog using a surface acoustic wave transducer has been proposed. This atomizer is suitable for miniaturization and for producing a very small amount of mist to control atmospheric conditions. The device comprises a 4×8×0.6 mm ³ LiNbO₃ piezoelectric substrate. High frequency electrical power of 48 MHz is transformed into mechanical vibration using an interdigital transducer. The high frequency mechanical vibration produces a lot of small particles of liquid. The linear mean diameter of the mist was about 5 μm. The atomizing rate was 170 μl/min at 2.3 W input power

Keywords

interdigital transducers; particle size; sprays; surface acoustic wave transducers; ultrasonic applications; 2.3 W; 48 MHz; 5 mum; LiNbO₃; LiNbO₃ piezoelectric substrate; atmospheric condition control; atomizing rate; dry fog production; high frequency electrical power; interdigital transducer; linear mean diameter; liquids atomization; mechanical vibration; miniaturization; nebulizer; small liquid particles; surface acoustic wave transducer; Acoustic transducers; Acoustic waves; Atomic layer deposition; Atomic measurements; Electrodes; Frequency; Liquids; Surface acoustic wave devices; Surface acoustic waves; Vibrations;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on

Conference_Location

Chicago, IL

Print_ISBN

0-7803-3829-4

Type

conf

DOI

10.1109/SENSOR.1997.635221

Filename

635221