Title :
Characteristics of liquids atomization using surface acoustic wave
Author :
Kurosawa, Minoru ; Futami, Akira ; Higuchi, Toshiro
Author_Institution :
Dept. of Precision Machinery Eng., Tokyo Univ., Japan
Abstract :
A novel way to produce dry fog using a surface acoustic wave transducer has been proposed. This atomizer is suitable for miniaturization and for producing a very small amount of mist to control atmospheric conditions. The device comprises a 4×8×0.6 mm 3 LiNbO3 piezoelectric substrate. High frequency electrical power of 48 MHz is transformed into mechanical vibration using an interdigital transducer. The high frequency mechanical vibration produces a lot of small particles of liquid. The linear mean diameter of the mist was about 5 μm. The atomizing rate was 170 μl/min at 2.3 W input power
Keywords :
interdigital transducers; particle size; sprays; surface acoustic wave transducers; ultrasonic applications; 2.3 W; 48 MHz; 5 mum; LiNbO3; LiNbO3 piezoelectric substrate; atmospheric condition control; atomizing rate; dry fog production; high frequency electrical power; interdigital transducer; linear mean diameter; liquids atomization; mechanical vibration; miniaturization; nebulizer; small liquid particles; surface acoustic wave transducer; Acoustic transducers; Acoustic waves; Atomic layer deposition; Atomic measurements; Electrodes; Frequency; Liquids; Surface acoustic wave devices; Surface acoustic waves; Vibrations;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.635221
