• DocumentCode
    2229947
  • Title

    Non-linearity and randomness in a semiconductor wafer fab

  • Author

    Johal, Sumer S.

  • Author_Institution
    Analog Devices Inc., Wilmington, MA, USA
  • fYear
    1996
  • fDate
    12-14 Nov 1996
  • Firstpage
    2
  • Lastpage
    6
  • Abstract
    Conventional intuition of semiconductor wafer fab performance relies on assumptions of linear work flow and fixed (deterministic) behavior of the fab equipment´s breakdown and capacity. This intuition is used to analyze fab capacity by using simple mathematical models in a “spreadsheet” fashion to obtain feasibility bounds on capacity (wafers out/unit time), cycle time (or lead time) and work-in-progress levels. However, assumptions of linearity and fixed behavior are not always valid, especially when strategic analysis needs to be done over long time horizons. This paper demonstrates the effects of such non-linearities and random (stochastic) behavior. This is done by modeling simple fab scenarios using advanced mathematical and discrete-event simulation tools. In particular, effects of a high degree of variance on equipment availability are investigated using serial representations of a manufacturing line. The impact of setup change-over times is also analyzed through random queuing scenarios in order to arrive at more accurate results of the line loading phenomenon. These results are then statistically analyzed to provide a contrast to conventional intuition
  • Keywords
    discrete event simulation; integrated circuit manufacture; production engineering computing; queueing theory; statistical analysis; stochastic processes; WIP levels; capacity-constrained situations; discrete-event simulation tools; equipment availability variance; equipment capacity; line loading phenomenon; manufacturing flow nonlinearity; manufacturing line; random behavior; random queuing scenarios; randomness; semiconductor wafer fab; setup change-over times; stochastic behavior; wafer fab performance; work-in-progress levels; Electric breakdown; Feeds; Linearity; Manufacturing; Mathematical model; Semiconductor device breakdown; Semiconductor device manufacture; Semiconductor device modeling; Stochastic processes; Throughput;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Advanced Semiconductor Manufacturing Conference and Workshop, 1996. ASMC 96 Proceedings. IEEE/SEMI 1996
  • Conference_Location
    Cambridge, MA
  • ISSN
    1078-8743
  • Print_ISBN
    0-7803-3371-3
  • Type

    conf

  • DOI
    10.1109/ASMC.1996.557961
  • Filename
    557961