Title :
Talbot effect: A venerable idea with new applications in nanofabrication
Author :
Urbanski, L. ; Wachulak, P. ; Isoyan, A. ; Stein, A. ; Menoni, C.S. ; Rocca, J. ; Marconi, M.
Author_Institution :
NSF ERC for Extreme Ultraviolet Sci. & Technol. & Electr. & Comput. Eng., Colorado State Univ., Fort Collins, CO, USA
Abstract :
We describe a coherent nanolithography approach using the Talbot effect in combination with a table top EUV laser emitting at 46.9 nm. The method was used to print large areas of periodic features with nanometer resolution.
Keywords :
Talbot effect; laser beam applications; nanofabrication; nanolithography; nanophotonics; Talbot effect; coherent nanolithography; nanofabrication; nanometer resolution; table top EUV laser; wavelength 46.9 nm; Fabrication; Imaging; Laser beams; Measurement by laser beam; Printing; Spatial coherence; Ultraviolet sources;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2011 Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-4577-1223-4
