DocumentCode
2230172
Title
A lateral comb-drive structure for energy scavenging
Author
Nounou, Ahmed ; Ragaie, Hani F.
Author_Institution
Ain Shams University
fYear
2004
fDate
5-7 Sept. 2004
Firstpage
553
Lastpage
556
Keywords
CMOS technology; Capacitance; Capacitors; Circuit testing; Fabrication; Micromechanical devices; Power engineering and energy; Power generation; Reservoirs; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Electrical, Electronic and Computer Engineering, 2004. ICEEC '04. 2004 International Conference on
Print_ISBN
0-7803-8575-6
Type
conf
DOI
10.1109/ICEEC.2004.1374528
Filename
1374528
Link To Document