Title :
A MEMS gimbal scanner for a miniature confocal microscope
Author :
Murakami, K. ; Kamiya, Y. ; Karatsu, K. ; Miyajima, H. ; Katashiro, M.
Author_Institution :
Olympus Opt. Co. Ltd., Tokyo, Japan
Abstract :
We have developed an electrostatic gimbal scanner for a unique miniature confocal microscope. The mirror flatness and Q factor are controlled by a stress-controlled silicon nitride. 12 deg. scan angle and 80 nm (PV) mirror flatness are achieved.
Keywords :
Q-factor; micro-optics; micromirrors; optical microscopes; optical scanners; MEMS gimbal scanner; Q-factor; SiN; electrostatic gimbal scanner; miniature confocal microscope; mirror flatness; stress-controlled silicon nitride; Electrostatics; Fasteners; Lenses; Light sources; Micromechanical devices; Mirrors; Optical fibers; Optical microscopy; Silicon; Stress control;
Conference_Titel :
Optical MEMs, 2002. Conference Digest. 2002 IEEE/LEOS International Conference on
Conference_Location :
Lugano, Switzerland
Print_ISBN :
0-7803-7595-5
DOI :
10.1109/OMEMS.2002.1031418
