Title :
Opportunities for Gigascale Integration (GSI) Beyond 2003
Author :
Meindl, James D.
Author_Institution :
Rensselaer Polytechnic Institute, New York
Keywords :
Circuits; History; Semiconductor device manufacture; Transistors;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference and Workshop, 1993. ASMC 93 Proceedings. IEEE/SEMI
DOI :
10.1109/ASMC.1993.682465
