Title :
Piezoelectric AlN film for SAW devices applications
Author :
Caliendo, C. ; Saggio, Giovanni ; Verardi, P. ; Verona, E.
Author_Institution :
Istituto di Acustica, CNR, Rome
fDate :
31 Oct-3 Nov 1993
Abstract :
Polycrystalline AlN films with the c-axis oriented normal to the substrate surface, were deposited by RF reactive diode magnetron sputtering on fused quartz, silicon and sapphire. The films were characterized as to their morphology, optic and acoustic characteristics. The phase velocity dispersion curves vs. normalized film thickness were evaluated theoretically together with the electromechanical coupling coefficient for the four different interdigital transducers geometries. The theoretical results were compared with the experimental values. Results showed AlN film suitable for applications to SAW devices
Keywords :
Rayleigh waves; aluminium compounds; piezoelectric thin films; sputtered coatings; surface acoustic wave devices; surface topography; AlN; RF reactive diode magnetron sputtering; SAW devices applications; acoustic characteristics; c-axis oriented; electromechanical coupling coefficient; interdigital transducers geometries; morphology; optical characteristics; piezoelectric AlN film; Diodes; Optical films; Piezoelectric devices; Piezoelectric films; Radio frequency; Semiconductor films; Sputtering; Substrates; Surface acoustic wave devices; Surface morphology;
Conference_Titel :
Ultrasonics Symposium, 1993. Proceedings., IEEE 1993
Conference_Location :
Baltimore, MD
Print_ISBN :
0-7803-2012-3
DOI :
10.1109/ULTSYM.1993.339578
