Title :
A large out-of-plane motion mechanism for optical applications
Author :
Tsai, J.M. ; Chien Cheng Chu ; Jerwei Hsieh ; Weileun Fang
Author_Institution :
Power Mech. Eng, Nat. Chiao Tung Univ., Hsinchu, Taiwan
Abstract :
Utilizing the high aspect ratio process on [111] Si substrate (BELST process), a large out-of-plane motion actuator that can be applied for MOEMS has been developed. In this design, the combination of vertical comb and robust leverage are exploited to provide an extremely large out-of-plane motion. Moreover, the thickness of the twin-beams torsional bar can also be trimmed to reduce the driving voltage.
Keywords :
micro-optics; microactuators; BELST process; MOEMS; Si; Si[111] substrate; driving voltage; high aspect ratio process; large out-of-plane motion actuator; optical applications; twin-beam torsional bar; vertical comb; Drives; Electrodes; Electrostatic actuators; Micromechanical devices; Mirrors; Numerical analysis; Optical switches; Robustness; Ultraviolet sources; Voltage;
Conference_Titel :
Optical MEMs, 2002. Conference Digest. 2002 IEEE/LEOS International Conference on
Conference_Location :
Lugano, Switzerland
Print_ISBN :
0-7803-7595-5
DOI :
10.1109/OMEMS.2002.1031442
