Title :
Microlenses array fabrication by hot embossing process
Author :
Hyup Sup Lee ; Sung-Keun Lee ; Tai Hun Kwon ; Lee, S.S.
Author_Institution :
Dept. of Mech. Eng., Pohang Univ. of Sci. & Technol., South Korea
Abstract :
For the mass production of microlenses array, the hot embossing process has been successfully utilized with a mold insert that is fabricated by Ni-electroplating based on a PMMA microstructure of microlenses array that is fabricated by the modified LIGA process.
Keywords :
LIGA; electroplating; microlenses; moulding; optical arrays; optical fabrication; Ni; Ni electroplating; PMMA microstructure; hot embossing process; mass production; microlens array fabrication; modified LIGA process; mold insert; Atomic measurements; Embossing; Lenses; Microoptics; Optical arrays; Optical device fabrication; Optical devices; Rough surfaces; Surface roughness; Temperature;
Conference_Titel :
Optical MEMs, 2002. Conference Digest. 2002 IEEE/LEOS International Conference on
Conference_Location :
Lugano, Switzerland
Print_ISBN :
0-7803-7595-5
DOI :
10.1109/OMEMS.2002.1031449
