DocumentCode :
2231297
Title :
The MMST Future-Factory Vision
Author :
Doering, Robert R.
Author_Institution :
Texas Instruments, Inc., Semiconductor Process and Design Center
fYear :
1993
fDate :
18-19 Oct 1993
Firstpage :
2
Lastpage :
3
Keywords :
Automatic control; Computer integrated manufacturing; Instruments; Integrated circuit technology; Microelectronics; Process control; Process design; Production facilities; Semiconductor device manufacture; Workstations;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Advanced Semiconductor Manufacturing Conference and Workshop, 1993. ASMC 93 Proceedings. IEEE/SEMI
Type :
conf
DOI :
10.1109/ASMC.1993.682466
Filename :
682466
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2231297
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