Title :
Resonant MOEMS scanner design and dynamics
Author_Institution :
KOC Univ., Istanbul, Turkey
Abstract :
In scanning systems, the speed of scanning, scanner resolution, and power requirements can be substantially reduced by using high-Q resonant scanners. We discuss the scanner features and dynamic modeling of resonant scanners for display and imaging applications.
Keywords :
micro-optics; optical scanners; display applications; dynamic model; imaging applications; resonant MOEMS scanner; Capacitance; Displays; Dynamic voltage scaling; Electrostatic actuators; Frequency; Micromechanical devices; Mirrors; Nonlinear optics; Optical sensors; Resonance;
Conference_Titel :
Optical MEMs, 2002. Conference Digest. 2002 IEEE/LEOS International Conference on
Conference_Location :
Lugano, Switzerland
Print_ISBN :
0-7803-7595-5
DOI :
10.1109/OMEMS.2002.1031454
