Title :
Software Engineering for Semiconductor Manufacturing Equipment Suppliers
Author :
Baudoin, Claude R. ; Kantor, Jeffrey P.
Author_Institution :
National Semiconductor Corporation, CA
Keywords :
Aerospace industry; Computer industry; Control systems; Costs; Hardware; Process control; Production facilities; Semiconductor device manufacture; Software engineering; Software performance;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference and Workshop, 1993. ASMC 93 Proceedings. IEEE/SEMI
DOI :
10.1109/ASMC.1993.682478
