Title :
Optical waveguide device realised using two SU-8/spl trade/ layers
Author :
Ansel, Y. ; Gindele, F. ; Scheurer, J. ; Schmitz, F.
Author_Institution :
IMM, Inst. of Microtechnology Mainz, Germany
Abstract :
A low cost fabrication process of planar waveguide devices using the SU-8/spl trade/ thick photoresist is presented. This process consist of the deposition of two photo-structurized resist layers filled with epoxy glue to realise the core waveguide. First results have shown acceptable optical propagation.
Keywords :
optical fabrication; optical planar waveguides; optical waveguide components; photolithography; photoresistors; SU-8 thick photoresist; epoxy glue; low cost fabrication process; optical propagation; optical waveguide device fabrication; planar waveguide devices; polymeric channel waveguide; positioning U-grooves; resist layer deposition; Optical device fabrication; Optical devices; Optical fibers; Optical films; Optical refraction; Optical surface waves; Optical waveguides; Resists; Temperature; Testing;
Conference_Titel :
Optical MEMs, 2002. Conference Digest. 2002 IEEE/LEOS International Conference on
Conference_Location :
Lugano, Switzerland
Print_ISBN :
0-7803-7595-5
DOI :
10.1109/OMEMS.2002.1031474
