DocumentCode :
2232336
Title :
A silicon-based tunable optical filter designed for low power consumption and fast thermal modulation
Author :
Hohlfeld, D. ; Zappe, H.
Author_Institution :
Inst. for Microsystem Technol., Freiburg Univ., Germany
fYear :
2002
fDate :
20-23 Aug. 2002
Firstpage :
171
Lastpage :
172
Abstract :
A novel MEMS-based concept for tunable optical filters, essential components for monitoring and reconfiguration of optical wavelength-division multiplexing (WDM) networks, is presented. The device is based on a Fabry-Perot interferometer employing a silicon cavity and silicon-based dielectric Bragg mirrors and is fabricated as a freestanding membrane. Wavelength tuning is achieved through thermal modulation of the resonator´s optical thickness. The present concept features low power consumption and fast thermal modulation. Measurements of optical filter performance and tunability are presented. The thermal behavior of the heater configuration is compared with numerical simulation results. By varying the resonator-length of a Fabry-Perot etalon, the transmission wavelength may be tuned.
Keywords :
Fabry-Perot interferometers; elemental semiconductors; micromirrors; optical communication equipment; optical fibre networks; optical filters; optical tuning; silicon; wavelength division multiplexing; Fabry-Perot interferometer; MEMS-based concept; Si-SiO/sub 2/; dielectric Bragg mirrors; freestanding membrane; heater configuration; optical thickness; optical wavelength-division multiplexing; power consumption; thermal modulation; transmission wavelength; tunable optical filter; wavelength tuning; Energy consumption; Monitoring; Optical design; Optical devices; Optical fiber networks; Optical filters; Optical interferometry; Optical modulation; Optical resonators; Wavelength division multiplexing;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Optical MEMs, 2002. Conference Digest. 2002 IEEE/LEOS International Conference on
Conference_Location :
Lugano, Switzerland
Print_ISBN :
0-7803-7595-5
Type :
conf
DOI :
10.1109/OMEMS.2002.1031497
Filename :
1031497
Link To Document :
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