Title :
Varying-density hole-array grating fabrication for plasmonic waveguide sensors
Author :
Xu, M.Y.-C. ; Aitchison, J.S.
Author_Institution :
Edward S. Rogers Sr. Dept. of Electr. & Comput. Eng., Univ. of Toronto, Toronto, ON, Canada
Abstract :
Varying-density hole-array-embedded trapezoidal SPP waveguides are designed to halve the resonant spectral width and to reduce the EBL machine time by 20 fold. Experimental observations are shown.
Keywords :
diffraction gratings; electron beam lithography; optical fabrication; optical waveguides; plasmonics; spectral line breadth; EBL machine time; electron beam lithography; plasmonic waveguide sensors; resonant spectral width; varying-density hole-array grating fabrication; Arrayed waveguide gratings; Fabrication; Optical surface waves; Plasmons; Surface waves;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2011 Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-4577-1223-4
