Title :
Effects and Interactions of Wafer Shape and Stepper Chucks on Wafer Flatness Control
Author :
Goodall, R. ; Kawski, J.
Author_Institution :
ADE Corporation, Newton, MA
Keywords :
Clamps; Data mining; Geometry; Lithography; Manufacturing; Metrology; Random access memory; Shape control; Shape measurement; Thickness measurement;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference and Workshop, 1993. ASMC 93 Proceedings. IEEE/SEMI
DOI :
10.1109/ASMC.1993.682494
