DocumentCode
2233397
Title
Low frequency drift in tunnel sensors
Author
Grade, John ; Barzilai, Aaron ; Reynolds, J. Kurth ; Liu, Cheng-Hsien ; Partridge, Aaron ; Miller, L.M. ; Podosek, J.A. ; Kenny, Tom
Author_Institution
Stanford Univ., CA, USA
Volume
2
fYear
1997
fDate
16-19 Jun 1997
Firstpage
871
Abstract
For several years, research has been underway on the use of electron tunneling as a displacement transducer in microsensors. This report describes recent measurements of low frequency noise and temperature coefficient of sensitivity tunneling transducers. Since the dominant source frequency noise in these transducers is due to thermal expansion mismatch, small modifications to the device structure should significantly improve the tunneling transducer performance
Keywords
electric sensing devices; microsensors; semiconductor device noise; thermal expansion; tunnelling; displacement transducer; electron tunneling; low frequency noise; microsensors; source frequency noise; temperature coefficient; thermal expansion mismatch; tunnel sensors; Acoustic transducers; Biomembranes; Counting circuits; Electrodes; Electrons; Frequency; Low-frequency noise; Temperature sensors; Thermal expansion; Tunneling;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location
Chicago, IL
Print_ISBN
0-7803-3829-4
Type
conf
DOI
10.1109/SENSOR.1997.635240
Filename
635240
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