2234441

Optimization of a High-Volume 200-mm BiCMOS Manufacturing Line

Hook, Terence ; Chen, Bomy ; Starkey, Gorden ; Bhattacharyya, Arup ; Faucher, Margaret ; Racine, Carol ; Willets, Christa ; Eslinger, Steven ; Kulkarni, Subhash ; King, William ; Washburn, Carol ; Piccirillo, Joseph ; Mongeon, Steven ; Johnson, Arthur ; G

IBM Technology Products, VT

1993

18-19 Oct 1993

152

155

BiCMOS integrated circuits; CMOS process; CMOS technology; FETs; Implants; Manufacturing; Protection; Resistors; Silicides; Silicon;

English

ieee

Advanced Semiconductor Manufacturing Conference and Workshop, 1993. ASMC 93 Proceedings. IEEE/SEMI

conf

10.1109/ASMC.1993.682502

682502