Design and characteristics of two-gimbals micro-gyroscopes fabricated with quasi-LIGA process

Author

Niu, Mengnian ; Xue, Weichen ; Wang, Xiaodong ; Xie, Jianfang ; Yang, Genqing ; Wang, Weiyuan

Author_Institution

Inst. of Metall., Acad. Sinica, Shanghai, China

Volume

2

fYear

1997

fDate

16-19 Jun 1997

Firstpage

891

Abstract

The vibrating microgyroscopes with two-gimbals structure were analyzed by finite element method (FEM) to obtain the optimal design and fabricated using quasi-LIGA process at temperature below 80°C. In the process, the electroplated Cu as sacrificial layer and Ni as structural material were used. When the total driving voltage ranges from 3 to 15 V, the vibration of inner gimbals and outer gimbals has been observed in atmosphere. The vibration frequency has been measured with optical fiber Mach-Zehnder interferometer, and its characteristics have been discussed

Keywords

copper; electroplating; elemental semiconductors; finite element analysis; gyroscopes; micromachining; microsensors; nickel; silicon; vibration measurement; 3 to 15 V; 80 C; Ni structural material; Ni-Si; Si; Si-Cu; driving voltage; electroplated Cu; finite element method; inner gimbals; optical fiber Mach-Zenhdel interferometer; optimal design; outer gimbals; quasi-LIGA process; sacrificial layer; two-gimbals micro-gyroscopes; vibrating microgyroscopes; vibration frequency; Atmosphere; Atmospheric measurements; Force sensors; Frequency measurement; Gyroscopes; Optical fibers; Optical interferometry; Resonance; Transducers; Vibration measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on

Conference_Location

Chicago, IL

Print_ISBN

0-7803-3829-4

Type

conf

DOI

10.1109/SENSOR.1997.635245

Filename

635245