DocumentCode
2236152
Title
Framework for an Advanced Inspection Program
Author
Cappel, Robert ; Nasr, Mary Beth
Author_Institution
Digital Equipment Corporation, Massachusetts
fYear
1993
fDate
18-19 Oct 1993
Firstpage
190
Lastpage
190
Keywords
Application specific integrated circuits; Atomic force microscopy; Automatic testing; CMOS process; Geometry; Inspection; Manufacturing automation; Product design; Semiconductor device testing; System testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Semiconductor Manufacturing Conference and Workshop, 1993. ASMC 93 Proceedings. IEEE/SEMI
Type
conf
DOI
10.1109/ASMC.1993.682509
Filename
682509
Link To Document