• DocumentCode
    2238591
  • Title

    Laser precision engineering from microfabrication to nanoprocessing

  • Author

    Hong, M.H. ; Huang, Z.Q. ; Lin, Y. ; Yun, J. ; Tan, L.S. ; Shi, L.P. ; Chong, T.C.

  • Author_Institution
    Dept. of Electr.&Comput. Eng., Nat. Univ. of Singapore, Singapore
  • fYear
    2008
  • fDate
    4-9 May 2008
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    Laser precision engineering has unique advantages of non-contact process, flexible setup and high speed processing in air. In the last decades, we have witnessed its extensive applications in various production lines. Combined with other advanced processing tools, laser nanofabrication will play a much more important role in the next generation manufacturing.
  • Keywords
    1/f noise; laser precision engineering; Gallium arsenide; Glass; Interference; Laser ablation; Laser beams; Optical arrays; Optical device fabrication; Optical microscopy; Precision engineering; Substrates; (140.3390) Laser materials processing; (220.4000) Microstructure; (220.4241) Nanostructure fabrication;
  • fLanguage
    English
  • Publisher
    iet
  • Conference_Titel
    Lasers and Electro-Optics, 2008 and 2008 Conference on Quantum Electronics and Laser Science. CLEO/QELS 2008. Conference on
  • Conference_Location
    San Jose, CA
  • Print_ISBN
    978-1-55752-859-9
  • Type

    conf

  • Filename
    4571558
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2238591