Title :
Laser precision engineering from microfabrication to nanoprocessing
Author :
Hong, M.H. ; Huang, Z.Q. ; Lin, Y. ; Yun, J. ; Tan, L.S. ; Shi, L.P. ; Chong, T.C.
Author_Institution :
Dept. of Electr.&Comput. Eng., Nat. Univ. of Singapore, Singapore
Abstract :
Laser precision engineering has unique advantages of non-contact process, flexible setup and high speed processing in air. In the last decades, we have witnessed its extensive applications in various production lines. Combined with other advanced processing tools, laser nanofabrication will play a much more important role in the next generation manufacturing.
Keywords :
1/f noise; laser precision engineering; Gallium arsenide; Glass; Interference; Laser ablation; Laser beams; Optical arrays; Optical device fabrication; Optical microscopy; Precision engineering; Substrates; (140.3390) Laser materials processing; (220.4000) Microstructure; (220.4241) Nanostructure fabrication;
Conference_Titel :
Lasers and Electro-Optics, 2008 and 2008 Conference on Quantum Electronics and Laser Science. CLEO/QELS 2008. Conference on
Conference_Location :
San Jose, CA
Print_ISBN :
978-1-55752-859-9
