Robust tracking control of piezoelectric fast steering mirror with hysteresis and disturbances correction

Piezoelectric fast steering mirror (PFSM) is widely used as a key component in many optical systems. However, the precise tracking control of the PFSM is a challenging task, because of the existence of hysteresis nonlinearity, mechanical resonance and all kinds of disturbances. In this paper, a PFSM is treated as a second-order system with hysteresis and disturbances. And then a robust adaptive control (RAC) method is proposed to mitigate the influence on tracking accuracy of PFSM. Next, the tracking control experiments for the desired angle were performed to validate the performance. From the experimental results, we can see that the PFSM achieves excellent tracking performance under the developed controller.