Title :
Triangular surface-relief grating for reduction of reflection from silicon surface in the 0.1–3 terahertz region
Author :
Kuroo, S. ; Shiraishi, K. ; Sasho, H. ; Yoda, H. ; Muro, K.
Author_Institution :
Grad. Sch. of Eng., Utsunomiya Univ., Yoto
Abstract :
A triangular surface-relief grating is proposed to reduce reflection from a silicon surface for the light in the terahertz frequency region. Optimum structural parameters of the grating have been numerically determined and confirmed experimentally.
Keywords :
antireflection coatings; diffraction gratings; silicon; Si; frequency 0.1 THz to 3 THz; reflection; silicon surface; surface-relief grating; Frequency; Gratings; Optical films; Optical reflection; Optical refraction; Optical surface waves; Optical variables control; Silicon; Structural engineering; Tellurium; (050.6624) Subwavelength structures; (300.6495) Spectroscopy, terahertz;
Conference_Titel :
Lasers and Electro-Optics, 2008 and 2008 Conference on Quantum Electronics and Laser Science. CLEO/QELS 2008. Conference on
Conference_Location :
San Jose, CA
Print_ISBN :
978-1-55752-859-9