DocumentCode
2240478
Title
European Workshop Materials for Advanced Metallization. MAM´97 Abstracts Booklet
fYear
1997
fDate
16-19 March 1997
Firstpage
1
Abstract
Presents the front cover and table of contents of the proceedings.
Keywords
ULSI; dielectric thin films; diffusion barriers; integrated circuit interconnections; integrated circuit metallisation; IC metallisation; dielectrics; diffusion barriers; silicides;
fLanguage
English
Publisher
ieee
Conference_Titel
Materials for Advanced Metallization, 1997. MAM '97 Abstracts Booklet., European Workshop
Conference_Location
Villard de Lans, France
ISSN
1266-0167
Type
conf
DOI
10.1109/MAM.1997.621040
Filename
621040
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