Title :
Frequency comb based interference microscope with a line-type image sensor
Author :
Choi, Samuel ; Shioda, Tatsutoshi ; Tanaka, Youke ; Kurokawa, Takashi
Author_Institution :
Graduate Sch. of Eng., Tokyo Univ. of Agric. & Technol., Tokyo
Abstract :
We present a frequency comb based interferometry with a broadband comb light source and a line-type image sensor for profilometry and optical tomography. The cross-sectional images were captured by varying the frequency interval of 25 GHz without mechanical shift. The resolution in depth direction was 35 mum.
Keywords :
image sensors; light interferometers; light interferometry; optical microscopes; optical tomography; surface topography measurement; broadband comb light source; frequency 25 GHz; frequency comb based interference microscope; line-type image sensor; optical tomography; profilometry; size 35 mum; Equalizers; Frequency; Glass; Image sensors; Interference; Lenses; Microscopy; Optical films; Optical interferometry; Optical waveguides;
Conference_Titel :
Lasers and Electro-Optics - Pacific Rim, 2007. CLEO/Pacific Rim 2007. Conference on
Conference_Location :
Seoul
Print_ISBN :
978-1-4244-1173-3
Electronic_ISBN :
978-1-4244-1174-0
DOI :
10.1109/CLEOPR.2007.4391287
