Demonstration of an electronic photonic integrated circuit in a commercial scaled bulk CMOS process

Author

Orcutt, Jason S. ; Khilo, Anatol ; Popovic, Milos A. ; Holzwarth, Charles W. ; Moss, Benjamin ; Li, Hanqing ; Dahlem, Marcus S. ; Bonifield, Thomas D. ; Kartner, Franz X. ; Ippen, Erich P. ; HOyt, Judy L. ; Ram, Rajeev J. ; Stojanovic, Vladimir

Author_Institution

Massachusetts Inst. of Technol., Cambridge, MA

fYear

2008

fDate

4-9 May 2008

Firstpage

1

Lastpage

2

Abstract

We demonstrate the first photonic chip designed in a commercial bulk CMOS process (65 nm node) using standard process layers combined with scalable post-processing, enabling dense photonic integration with high-performance microprocessor electronics.

Keywords

CMOS integrated circuits; integrated optics; commercial scaled bulk CMOS process; dense photonic integration; electronic photonic integrated circuit; high-performance microprocessor electronics; photonic chip; scalable post-processing; size 65 nm; standard process layers; CMOS process; Filter bank; Integrated circuit interconnections; Optical filters; Optical losses; Optical ring resonators; Optical waveguides; Photonic integrated circuits; Silicon; Testing; (200.4650) Optical interconnects; (230.7370) Waveguides; (250.5300) Photonic integrated circuits;

fLanguage

English

Publisher

iet

Conference_Titel

Lasers and Electro-Optics, 2008 and 2008 Conference on Quantum Electronics and Laser Science. CLEO/QELS 2008. Conference on

Conference_Location

San Jose, CA

Print_ISBN

978-1-55752-859-9

Type

conf

Filename

4571838