Title :
High Average Power and High Repetition Solid State Laser for EUV Lithography
Author :
Fujita, Hisanori ; Nakatsuka, Masahiro ; Bhushan, Ravi ; Tsubakimoto, Kouji ; Yoshida, Hidetsugu ; Miyanaga, Noriaki ; Izawa, Yasukazu
Author_Institution :
Inst. of Laser Eng., Osaka Univ., Osaka
Abstract :
We have been developing a high repetition (5 kHz) and high power (5 kW) Nd:YAG laser system pumped by cw LDs for EUV lithography. Design concepts and experimental results will be reported.
Keywords :
neodymium; optical pumping; solid lasers; ultraviolet lithography; EUV lithography; YAG:Nd; frequency 5 kHz; high average power laser; high repetition solid state laser; optical pumping; power 5 kW; Fiber lasers; Laser excitation; Laser modes; Lithography; Power lasers; Pulse amplifiers; Pulse modulation; Pump lasers; Semiconductor laser arrays; Solid lasers;
Conference_Titel :
Lasers and Electro-Optics - Pacific Rim, 2007. CLEO/Pacific Rim 2007. Conference on
Conference_Location :
Seoul
Print_ISBN :
978-1-4244-1173-3
Electronic_ISBN :
978-1-4244-1174-0
DOI :
10.1109/CLEOPR.2007.4391454
