Title :
Laser-Imaging of Laser-Produced Tin Plume Behavior for EUV Light Source
Author :
Nakamura, Daisuke ; Hashimoto, Yuki ; Tamaru, Koji ; Takahashi, Asami ; Okada, Tatsuo
Author_Institution :
Graduate Sch. of Inf. Sci. & Electr. Eng., Kyushu Univ., Fukuoka
Abstract :
Debris, generated form a laser-produced Sn plasma extreme-ultraviolet source for the next generation optical lithography, was investigated by the laser-induced fluorescence (LIF) imaging for Sn atoms and a Faraday cup for ionic species. The sputtering by the fast ions from the plasma was also investigated by the LIF method.
Keywords :
fluorescence; plasma diagnostics; plasma production by laser; plasma sources; sputtering; tin; ultraviolet lithography; ultraviolet sources; EUV light source; Faraday cup; LIF method; Sn; debris generation; ionic species; laser-induced fluorescence imaging; laser-produced plasma source; optical lithography; sputtering; tin plume behavior; Atom lasers; Atom optics; Fluorescence; Light sources; Lithography; Optical imaging; Particle beam optics; Plasma sources; Tin; Ultraviolet sources;
Conference_Titel :
Lasers and Electro-Optics - Pacific Rim, 2007. CLEO/Pacific Rim 2007. Conference on
Conference_Location :
Seoul
Print_ISBN :
978-1-4244-1173-3
Electronic_ISBN :
978-1-4244-1174-0
DOI :
10.1109/CLEOPR.2007.4391455
