Title :
Picometer calibrator for precision linear encoder using a laser interferometer
Author :
Kajima, Mariko ; Minoshima, Kaoru
Author_Institution :
Nat. Inst. of Adv. Ind. Sci. & Technol. (AIST), Tsukuba, Japan
Abstract :
A calibration system for precision linear encoders was developed. This system evaluated interpolation errors with an expanded uncertainly of 0.55 nm (k=2). A commercial laser interferometer was calibrated, and its cyclic error was evaluated.
Keywords :
calibration; encoding; interpolation; light interferometers; optical elements; calibration system; commercial laser interferometer; cyclic error; interpolation errors; picometer calibrator; precision linear encoder; Adaptive optics; Calibration; Measurement by laser beam; Optical interferometry; Optical mixing; Ultrafast optics;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2011 Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-4577-1223-4
