Title :
Microstructured chalcogenide glasses using femtosecond laser irradiation or photolithography
Author :
Anderson, T. ; Carlie, N. ; Hu, J. ; Petit, L. ; Agarwal, A. ; Choi, J. ; Kimerling, L.C. ; Richardson, K. ; Richardson, M.
Author_Institution :
Coll. of Opt. & Photonics, Central Florida Univ., Orlando, FL
Abstract :
We present the microstructuring of bulk and film chalcogenide glasses using IR femtosecond laser exposure and photolithography for molecular sensing.
Keywords :
chalcogenide glasses; chemical sensors; high-speed optical techniques; laser materials processing; optical glass; photolithography; semiconductor thin films; bulk chalcogenide glasses; femtosecond laser exposure; femtosecond laser irradiation; film chalcogenide glasses; infrared laser exposure; microstructured chalcogenide glasses; molecular sensing; photolithography; Glass; Lithography; Nonlinear optics; Optical films; Optical materials; Optical sensors; Optical waveguides; Refractive index; Ultrafast optics; Waveguide lasers; (140.3390) Laser materials processing; (230.7370) Waveguides;
Conference_Titel :
Lasers and Electro-Optics, 2008 and 2008 Conference on Quantum Electronics and Laser Science. CLEO/QELS 2008. Conference on
Conference_Location :
San Jose, CA
Print_ISBN :
978-1-55752-859-9
