Silicon bulk micromachined accelerometer with simultaneous linear and angular sensitivity

Author

Mizuno, Jun ; Nottmeyer, Kay ; Kobayashi, Takashi ; Minami, Kazuyuki ; Esashi, Mdsayoshi

Author_Institution

R&D Center, Zexel Corp., Saitama, Japan

Volume

2

fYear

1997

fDate

16-19 Jun 1997

Firstpage

1197

Abstract

A silicon bulk micromachined accelerometer structure has been fabricated and characterized, that combines linear and angular sensitivity in a single device. Unlike micromachined gyro-scopes no vibratory motion is involved for the detection of rotation, but the direct effect of linear and angular acceleration is detected by simultaneous monitoring of the displacement and tilt of the seismic mass. One axis of linear and up to two axes of angular acceleration can be measured. This combination has practical relevance for single-point sensing of the complete motion of a car body with a minimum number of sensors in applications like vehicle dynamic control or crash detection

Keywords

accelerometers; angular velocity measurement; automotive electronics; elemental semiconductors; micromachining; microsensors; silicon; Si; Si bulk micromachined accelerometer; angular sensitivity; car body motion; crash detection; linear sensitivity; rotation detection; seismic mass displacement monitoring; seismic mass tilt monitoring; single-point sensing; vehicle dynamic control; Acceleration; Accelerometers; Monitoring; Motion control; Motion detection; Seismic measurements; Silicon; Vehicle crash testing; Vehicle detection; Vehicle dynamics;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on

Conference_Location

Chicago, IL

Print_ISBN

0-7803-3829-4

Type

conf

DOI

10.1109/SENSOR.1997.635420

Filename

635420