Title :
A piezoresistive accelerometer with a novel vertical beam structure
Author :
Chen, Hong ; Bao, Minhang ; Zhu, Haijun ; Shen, Shaoqun
Author_Institution :
Dept. of Electron. Eng., Fudan Univ., Shanghai, China
Abstract :
A beam-mass piezoresistive micro-accelerometer sensitive to acceleration components in the chip plane and vertical to the beam direction has been developed. The beam is in the ⟨100⟩ direction with sidewalls vertical to the (001) wafer surface. The top side of the beam is widened slightly to make enough room to accommodate the piezoresistors. Therefore, the beam has a T-shaped cross-section. Two n-type piezoresistors on the top side of the beam, forming a half bridge, serve as sensing elements. The sensitivity of the device is about 0.5 mv/g/5v and the resonant frequency is about 1.2 kHz
Keywords :
accelerometers; frequency response; micromachining; micromechanical resonators; microsensors; piezoresistive devices; (001) wafer surface; 1.2 kHz; Si; T-shaped cross-section; acceleration sensitivity; beam-mass piezoresistive micro-accelerometer; half bridge; n-type piezoresistors; piezoresistive accelerometer; resonant frequency; sensing element design; vertical beam structure; Acceleration; Accelerometers; Bridges; Flanges; Particle beams; Piezoresistance; Piezoresistive devices; Resistors; Resonant frequency; Stress;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.635421
