Title :
MEMS micro-switches for use in DC, RF, and optical applications
Author_Institution :
Functional Devices Res. Labs., NEC Corp., Ibaraki, Japan
fDate :
Oct. 31 2001-Nov. 2 2001
Abstract :
In this paper, our works on Micro Electro Mechanical Systems (MEMS) micro-switches for use in DC, RF, and optical applications are reviewed.
Keywords :
micro-optics; micromechanical devices; optical switches; switches; DC applications; MEMS micro-switch; RF applications; optical applications; Filters; Insertion loss; Micromechanical devices; Microrelays; Microswitches; Optical attenuators; Radio frequency; Relays; Switches; Voltage;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2001 International
Conference_Location :
Shimane, Japan
Print_ISBN :
4-89114-017-8
DOI :
10.1109/IMNC.2001.984062
