Title :
Nano chamber fabrication on an acrylic plate by direct nano imprint lithography using quartz mold
Author :
Hirai, Y. ; Takagi, N. ; Toyota, H. ; Harada, S. ; Yotsuya, T. ; Tanaka, Y.
Author_Institution :
Dept. of Mech. Syst. Eng., Osaka Prefecture Univ., Japan
fDate :
Oct. 31 2001-Nov. 2 2001
Abstract :
Nano-imprint lithography (S.Chou et al, J. Vac. Sci. Technol. vol. B14, p. 4129-4133, 1996) is a promising technology for nano structure fabrication with low cost. Several applications have been reported, whose targets are mainly fabrication of Si ULSI or other electric devices. In this work, we demonstrate nano holes fabrication on an acrylic plate using a quartz mold. The imprinted patterns could be applied to nano chambers for DNA analysis or anti-reflection structures for diffractive optical elements.
Keywords :
antireflection coatings; diffractive optical elements; lithography; moulding; nanotechnology; polymers; DNA analysis; Si ULSI; acrylic plate; anti-reflection structure; diffractive optical elements; direct nano imprint lithography; electric devices; imprinted patterns; nano chamber fabrication; nano chambers; nano holes fabrication; nano structure fabrication; nano-imprint lithography; quartz mold; Costs; DNA; Electron beams; Electron optics; Etching; Lithography; Magnetic materials; Optical device fabrication; Optical diffraction; Plasma applications;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2001 International
Conference_Location :
Shimane, Japan
Print_ISBN :
4-89114-017-8
DOI :
10.1109/IMNC.2001.984110
