Nano chamber fabrication on an acrylic plate by direct nano imprint lithography using quartz mold

Author

Hirai, Y. ; Takagi, N. ; Toyota, H. ; Harada, S. ; Yotsuya, T. ; Tanaka, Y.

Author_Institution

Dept. of Mech. Syst. Eng., Osaka Prefecture Univ., Japan

fYear

2001

fDate

Oct. 31 2001-Nov. 2 2001

Firstpage

104

Lastpage

105

Abstract

Nano-imprint lithography (S.Chou et al, J. Vac. Sci. Technol. vol. B14, p. 4129-4133, 1996) is a promising technology for nano structure fabrication with low cost. Several applications have been reported, whose targets are mainly fabrication of Si ULSI or other electric devices. In this work, we demonstrate nano holes fabrication on an acrylic plate using a quartz mold. The imprinted patterns could be applied to nano chambers for DNA analysis or anti-reflection structures for diffractive optical elements.

Keywords

antireflection coatings; diffractive optical elements; lithography; moulding; nanotechnology; polymers; DNA analysis; Si ULSI; acrylic plate; anti-reflection structure; diffractive optical elements; direct nano imprint lithography; electric devices; imprinted patterns; nano chamber fabrication; nano chambers; nano holes fabrication; nano structure fabrication; nano-imprint lithography; quartz mold; Costs; DNA; Electron beams; Electron optics; Etching; Lithography; Magnetic materials; Optical device fabrication; Optical diffraction; Plasma applications;

fLanguage

English

Publisher

ieee

Conference_Titel

Microprocesses and Nanotechnology Conference, 2001 International

Conference_Location

Shimane, Japan

Print_ISBN

4-89114-017-8

Type

conf

DOI

10.1109/IMNC.2001.984110

Filename

984110