Title :
Three-dimensional metal microfabrication technique by using two-photon reduction
Author :
Takeyasu, Nobuyuki ; Tanaka, Takuo ; Kawata, Satoshi
Author_Institution :
Nanophotonics Lab., RIKEN, Saitama
Abstract :
We propose micro-fabrication technique that enables us to obtain arbitrary 3D micro/nano metallic structures by scanning the laser beam spot in three dimensions. The spatial resolution and the electrical conductivity of the fabricated structures are discussed.
Keywords :
laser materials processing; micromachining; two-photon processes; 3D metal microfabrication technique; arbitrary 3D micro/nano metallic structures; electrical conductivity; laser beam spot; two-photon reduction; Conductivity; Laser beams; Laser mode locking; Lenses; Microscopy; Nanophotonics; Optical device fabrication; Power lasers; Silver; Wires;
Conference_Titel :
Lasers and Electro-Optics - Pacific Rim, 2007. CLEO/Pacific Rim 2007. Conference on
Conference_Location :
Seoul
Print_ISBN :
978-1-4244-1173-3
Electronic_ISBN :
978-1-4244-1174-0
DOI :
10.1109/CLEOPR.2007.4391626
